Microsystems Technology Office (MTO) Office-wide
This funding opportunity supports innovative research in microsystems technology, targeting a wide range of applicants including universities, small businesses, and minority institutions, to develop advanced microelectronic systems that enhance U.S. national security.
The Microsystems Technology Office (MTO) Office-wide funding opportunity, issued by the Defense Advanced Research Projects Agency (DARPA), invites proposals under a Broad Agency Announcement (BAA) mechanism to support innovative and high-risk research in microsystems technology. MTO has a longstanding mission of creating and preventing strategic technological surprise by developing cutting-edge microelectronic systems such as integrated circuits, microelectromechanical systems, and photonic devices. This office-wide BAA serves as a vehicle for soliciting groundbreaking ideas not currently addressed in existing MTO programs or published solicitations, aiming to push the boundaries of science, devices, and systems with significant potential to impact U.S. national security and microsystems superiority. DARPA is particularly interested in proposals aligned with three overarching thrust areas: scientific disruption, microsystems manufacturing ecosystem, and dual use by design. Under scientific disruption, MTO seeks new classes of transistors and computing paradigms, including photonic, quantum, and bio/organic circuits. Research into photonic circuits focuses on enabling high-performance data transport using light at the chip level, while quantum circuits aim to support scalable, cryogenic quantum computing systems. The bio/organic circuits initiative targets integration of biomolecules with micro-technologies for high-speed, low-power computation beyond the capabilities of inorganic systems. The manufacturing ecosystem thrust encourages environmentally sustainable and efficient microsystems fabrication approaches. This includes research into direct nanoscale semiconductor manufacturing, advanced material synthesis, and recycling or reuse of existing microelectronic components. Proposals under the dual use by design thrust should enable technologies that are commercially viable yet fulfill defense-specific performance requirements. Areas of interest include secure hardware, scalable manufacturing platforms, advanced batteries, and complex microsystem assembly under constrained supply chains. The BAA allows for the submission of abstracts and full proposals on a rolling basis, with abstract submissions accepted until January 15, 2026, and full proposals due by March 2, 2026, at 1:00 p.m. ET. Abstracts are optional but strongly encouraged to reduce the burden of full proposal preparation. Final proposals must follow the templates and instructions outlined in Attachments B through E of the BAA. An accelerated award option is available for selected proposals not exceeding $2 million, with awards made within 30 days of selection. Applicants are required to submit information about any artificial intelligence tools used in their proposal preparation, although this will not influence evaluation. Proposals will be evaluated based on three primary criteria: overall scientific and technical merit, potential contribution to DARPA’s mission, and cost realism. Successful applicants should demonstrate innovative approaches, technical feasibility, a qualified team, and clear deliverables. DARPA expects research to leverage prior work and encourages cost-sharing for proposals with potential commercial application. Eligibility is broad, including all responsible sources capable of meeting DARPA’s needs, both domestic and foreign. Institutions such as Historically Black Colleges and Universities (HBCUs), Minority Institutions (MIs), and small businesses are encouraged to apply, although no specific portion of the funding is reserved for these entities. The program is unclassified, though provisions exist for secure classified submissions if needed. All proposals are subject to DARPA’s cybersecurity requirements, specifically CMMC Level 2 certification for procurement contracts awarded after November 10, 2025. Additionally, some proposals may include restrictions related to fundamental research and publishing. Contact for this opportunity is the MTO BAA Coordinator, who can be reached at [email protected]. For more information, applicants are directed to resources such as DARPAConnect and the APEX Accelerators program for assistance with proposal development and compliance.
Award Range
Not specified - $2,000,000
Total Program Funding
Not specified
Number of Awards
Not specified
Matching Requirement
No
Additional Details
Accelerated awards ≤ $2M; multiple award types; supports high-risk R&D in quantum, photonics, manufacturing, bio circuits
Eligible Applicants
Additional Requirements
Eligible applicants include a broad range of entities, including academic institutions, private industry, small businesses, government research organizations, and non-U.S. organizations that comply with security and export control regulations. DARPA strongly encourages participation from Historically Black Colleges and Universities (HBCUs), Minority Institutions, and Small Disadvantaged Businesses, although no specific set-asides are established. Federally Funded Research and Development Centers (FFRDCs) and other government entities should consult DARPA before submission to verify eligibility.
Geographic Eligibility
All
Abstracts allow early feedback and reduce prep effort; clearly outline technical goals, risk mitigation, transition plans, and cost realism.
Application Opens
May 9, 2024
Application Closes
March 2, 2026
Grantor
U.S. Department of Defense (DARPA - Microsystems Technology Office )
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